Ph.D. and D.Sc. Theses: Sensors, MEMS, Measuring Instruments

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P.M.F. Snoeij

Analog Signal Processing for CMOS Image Sensors, Delft University of Technology, The Netherlands

O. A. Soloviev

Methods and sensors for accurate wavefront measurements, Delft University of Technology, The Netherlands

P.Turmezei

M. Pertijs

Manuel E. Ruiz-Sandoval

“Smart” Sensors for Civil Infrastructure Systems, University of Notre Dame, Indiana

Lemi Toygur

Interface Circuits in SOI-CMOS for High-Temperature Wireless Micro-Sensors

F. Reverter

Claudia Bonomo

Emergent Polymeric Material, Motion Controlled Actuators and Sensors from New Experiments to Innovative Models, Dipartimento di Ingegneria

Elettrica, Elettronica e dei Sistemi, Università degli Studi di Catania

Abstract: The work focuses on ionic polymer metal composites as motion actuators and sensors, studied from the fabrication technology to the characterization and modeling. New experimental setup has been designed to obtain useful nonlinear models and to realize a suitable control strategy. Several applications will be presented, among them an integrated intelligent sensor and actuator system.

Alvaro Hernandez Alonso

Application of Reconfigurable Architectures to the Design of Ultrasonic Sensorial Systems, Departamento de Electronica, Universidad de Alcala, E.P., Campus Universitario s/n, 28806, Alcala de Henares, Madrid, Spain

Abstract: This thesis presents a new sonar system with application to mobile robotics. It has been designed and optimized to overcome some common constraints in this kind of sensorial system. A sensor with four transducers obtains more information from the environment in a shorter scanning time. A series of algorithms is proposed for the interpretation of ultrasonic measurements and development of diverse types of computing architectures to obtain a realtime implementation.

E.Allier

Asynchronous Analog to Digital Interface: a New Class of Converters Based on Time Quantization, TIMA Laboratory, France.

Edmond Cretu 

Inertial MEMS Devices: Modeling, Design and Applications, Delft University of Technology, The Netherlands

Abstract: Exploiting the synergic coupling at microscale between the mechanical and electrical energy domains is the driving force behind the effort undertaken in this thesis. The trajectory followed started with an analysis of a theoretical foundation for a unified modeling and analysis of mixed energy domains, and reached the application level in the field of inertial MEMS sensors.

Davey Wijngaards

Lateral On-chip Integrated Peltier Elements Based on Polycrystalline Silicon Germanium, Delft University of Technology, The Netherlands

Abstract: The Peltier effect is the driving force behind the coolers described in this thesis. Due to this effect, at the junction of two through which an electrical current is running, heart is absorbed in that junction, depending on the direction of the electrical current. This thesis treats all relevant aspects related to the development of on-chip integrated Peltier coolers: - Extensive models are provided that are used to optimize device performance and incorporate the influence of the most significant non-idealities; - A full thermophysical characterization of polySiGe is provided; Fabrication processes and constraints are treated in details; - Device performance is measured and discussed, together with the ways in which the on-chip integrated cooler can be applied.

Ovidiu Bajdechi

Systematic Design of Sigma-Delta Analog-to-Digital Converters, Delft University of Technology, The Netherlands

Abstract: This thesis describes the issue related to sigma-delta analog-to-digital converter (ADC) design in a systematic manner, from the top level of abstraction represented by the filters defining signal and noise transfer functions (STF, NTF), passing through the architecture-level where topology-related performance is calculated and simulated, and finally down to parameters of circuit elements like resistors and capacitors in the integrators and amplifier transconductances.

Serhat Sakarya

Micromachining Techniques for Fabrication of Integrated Light Modulating Devices, Delft University of Technology, The Netherlands

Abstract: In this thesis, several aspects of light-modulating devices are explored and implemented to reach the objective of developing technology necessary for fabrication of these devices in a high-quality and low-cost manner using standard processes.

Frederic Laugere

Conductivity Detection for Application in Capillarity Electrophoresis Microchips, Delft University of Technology, The Netherlands

Abstract: In this thesis, conductivity detection for application in capillary electrophoresis microchips is discussed. In addition to the electronics for detection readout, an electronic setup that allows full decoupling of the contactless conductivity detector and the separation column is presented.

Houri Johari

Radka Ivanova Veltcheva

Investigations of Temperature Sensors based on Thermosensitive Quartz Crystal Resonators, Institute of Solid State Physics, Bulgarian Academy of Science

Ashwin Arunkumar Seshia

Integrated Micromechanical Resonant Sensors for Inertial Measurement Systems

F. Parran

Tactile Fingerprint Sensor Using Piezoresistive Microstructures, TIMA Laboratory, France

J. Goy

Study, Conception and Fabrication of an APS Image Sensor, TIMA Laboratory, France

B. Palan

Design of Low Noise pH-ISFET Microsensors and Integrated Suspended Inductors with Increased Quality Factor Q, TIMA Laboratory, France

Seong Ho Kong

Infrared Micro-Spectrometer Based on a Multi-Slit Grating, Delft University of Technology, The Netherlands

Abstract: This thesis describes the design, fabrication and characterization of a miniaturized spectrometer that operates in the infrared range of the electromagnetic spectrum.

H. Ohji

Macroporous Silicon Based Micromachining, Delft University of Technology, The Netherlands

Abstract: This thesis has presented a new micromachining technique based on the use of macroporous silicon. Macroporous silicon has a structure of straight holes with a diameter between 20 nm and a few microns. Firstly, general introduction of micromachining and porous silicon has been given. Then, the etching properties for n-type and p-type silicon were described. Finally, two devices, a DNA separation device and an accelerometer fabricated by macroporous based micromachining were shown.

Bohuslav Palan

Design of Low Noise pH-ISFET Microsensors and Integrated Suspended Inductors with Increased Quality Factor Q, Institut National Polytechnique de Grenoble

Abstract: This thesis describes the contributions to investigation and development of pH sensing structures and RF passive communication parts of a microsystem for biomedical applications. ISFETs (Ion-Sensitive Field Effect Transistors) promise to become important sensors for biomedical applications where low cost, small size and integration with integrated circuits are desirable features. The ISFETs are today commercially available and are employed in pH-meters. However, their prices are still higher than glass pH-electrode systems. Furthermore, commercial ISFETs are manufactured using old specially dedicated technologies, which do not allow integration of interfacing circuit on the same chip.

Miodrag Djurica

Design of Low Power Analog to Digital Converters. Sigma-Delta Converters, Delft University of Technology, The Netherlands

Abstract: This thesis is concerned with the power consumption in electronic circuits. More specifically, it deals with modeling and design of electronic circuits. Focus of the research is the analysis of power consumption in ADCs with regard to their specifications. Practical goal was to design a 16 bit ADC for medical applications, operating on batteries.

A.Berthold

Low-Temperature Wafer-to-Wafer Bonding for Microchemical Systems, Delft University of Technology, The Netherlands

Abstract: the thesis contains the description of newly developed technologies which are used for realization of novel integrated (bio)chemical sensors and sensor systems.

L.J.Breems

Continuous-Time Sigma-Delta Modulation for IF A/D Conversion in Radio Receivers, Delft University of Technology, The Netherlands

Abstract: this thesis describes the theory, design and realization of continuous-time sigma-delta modulators for IF-to-baseband analog-to-digital (A/D) conversion in radio receivers. The challenge of the work is to design the sigma-delta modulator with high linearity, large dynamic range and strong image rejection capabilities. With this A/D converter, requirements for a receiver architecture in terms of selectivity and sensitivity are relaxed, resulting in a cheaper system with a higher level of integration.

C.V.B.Cotofana

Low-cost Sensor Packaging, Delft University of Technology, The Netherlands

Abstract: The present dissertation deals with the introduction and implementation of new low-cost sensor packaging solutions that can be applied for a wide range of sensor applications.

Volodymyr V. Khoma

Development of Theory and Design Principles of Problem-Oriented Immitance Measuring Instruments, State University Lviv Polytechnic, UA

Abstract. Thesis are dedicated to the problems of immitance measuring instruments design oriented on physical objects investigation by the means of measurement of time, frequency, spatial and energetic immitance peculiarities. New methods for design of direct transforming and autocompensation immitance measuring instruments build on the modern digital hardware are developed. The proposed instruments afford good "speed-accuracy" trade-off, straightforward accomplishment, flexibility of measuring channel parameters. Methodology for design of immitance measuring instruments with fixed parameters is proposed.

Anton Bakker

High-Accuracy CMOS Smart Temperature Sensors, Delft University of Technology, The Netherlands

Abstract: This thesis describes the theory and design of high-accuracy CMOS smart temperature sensors. The major topic of the work is the realization of a smart temperature sensor that has an accuracy that is so high that it can be applied without any form of calibration. This is achieved by applying different kinds of dynamic offset-cancellation techniques. Integrated in a low-cost CMOS technology, this yields one of the most inexpensive intelligent general purpose temperature sensors in the world.

Li-Te Yin

Study of Biosensors Based on an Ion Sensitive Field Effect Transistor, Chung-Yuan Christian University

Arvind K. Srivastava

Applications of Artificial Neural Networks in Gas/Odor Identification Using Sensor Arrays, Institute of Technology, Banaras Hindu University, Varanasi, India

Abstract: The work focuses the design of neural network pattern classifier for sensor array data processing. Innovative aspect of this work was the development of neuro-genetic pattern classifier based on advanced genetic operators for efficient training of neural networks. Proposed methods were tested over integrated and discrete sensor arrays exposed to range of laboratory chemicals. Results of the proposed methods were compared with the conventional backpropagation tranined neural network which found to be very encouraging and hence can be incorporated in the intelligent gas detection system.

Paul C. de Jong

Smart Sensor Systems for High-Temperature applications, Delft University of Technology, The Netherlands

Abstract: The purpose of this work is to develop design methodologies for packaged high temperature electronic systems. Generalizing theories will be addressing both electronic system design and packaging issues.

Rafael J. Betancourt-Zamora

The BioLink Implantable Sensor Telemetry System, Stanford University, Stanford, CA

Abstract: Most biotelemetry applications deal with the moderated data rates of biological signals. Few people have studied the problem of transcutaneous data transmission at the rates required by NASA’s Life Sciences-Advanced BioTelemetry System (LS-ABTS). Implanted telemetry eliminate the problems associated with wire breaking the skin, and permits experiments with awake and unrestrained subjects. Our goal is to build a low-power 174-216MHz RF transmitter suitable for short range biosensor and implantable use.

A system architecture based on a Frequency-Locked Loop (FLL) Frequency Synthesizer is presented, and a novel differential frequency discriminator that eliminates the need for a frequency divider is also shown. A self-synchronizing phase modulation scheme suitable for low power implementation was also developed. A full system-level simulation of the FLL was performed and loop filter parameters were determined. The implantable antenna has been designed, simulated and constructed. An implant package compatible with the ABTS requirements is also being proposed.

The Hajimiri phase noise model was used to optimize the VCO for minimum power consumption. We compare the phase noise performance of three buffer stages using clamped, symmetric and cross-coupled loads, respectively. We propose a cross-coupled buffer topology that achieves lower phase noise by exploiting symmetry. A test chip was fabricated in a 0.5µm, 3V CMOS process. Measured phase noise for a 1.2mW, 200MHz VCO is -103.9 dBc/Hz at 500KHz offset, showing good agreement with the theory. Further work entails detailed transistor-level design of the FLL and a monolithic implementation of the transmitter in 0.5µm CMOS technology.

Zsolt Kadar

Integrated Resonant Magnetic Field Sensor, Delft University of Technology, The Netherlands

Abstract: In this thesis the design and realization of a bulk-micromachined integrated resonant magnetic field sensor is described. This new sensor features high sensitivity and large dynamic range which makes it possible to measure strong as well as very weak magnetic fields with the same device.

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Sergey Y. Yurish

Program-Oriented Methods and Measuring Instruments for Frequency-Time Parameters of Electric Signals, State University Lviv Polytechnic, UA

Abstract: This thesis describes theory, simulation and practical realisation of novel program-oriented self-adopted methods for frequency-to-code conversion. Due to these methods the minimum possible hardware, constant quantization error in all measuring range and non-redundant time of measurement were achieved. These methods can be used for different smart sensors signal processing and data acquisition in frequency-time domain.

Xiujun Li

Low-Cost Smart Capacitive Sensors for Position and Speed Measurement, Delft University of Technology, The Netherlands

Abstract: A new contactless resistive-potentiometric sensor is described in this thesis as a practical example of special type of capacitive sensor System is that in which the capacitor's excitation signal is modified by the measurand via other devices, such as resistors.

Ferry N. Toth

A Desing Methodology for Low-Cost, High-Performance Capacitive sensors, Delft University of Technology, The Netherlands

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Gert van der Horn

Integrated Smart Sensor Calibration, Delft University of Technology, The Netherlands.

Abstract: The production costs for sensors can be reduced significantly by automating the calibration procedure. This book presents different options for including a digitally programmable calibration circuit in an integrated smart sensor. These options are based on a calibration of the signal transfer using analog signal processing, digital signal processing, or a mixed-mode technique using sigma-delta modulation. Besides these calibration circuits, also the other functional blocks needed in integrated smart sensors are presented. Furthermore, several linearisation techniques are explained, including an efficient step-wise polynomial calibration method. The combination of a programmable calibration circuit and a digital bus interface, both included in the smart sensor, enables the desired automation of the calibration procedure for a large batch of sensors at a time.

Michael Kraft

Closed Lool Digital Accelerometer Employing Oversampling Conversion, Coventry University, School of Engineering, UK.

Abstract: This research programme comprises the development of a digital, closed loop accelerometer based upon a capacitive, bulk-micromachined sensing element manufactured.

Frank van der Goes

Low-Cost Smart Sensor Interfacing, Delft University of Technology, The Netherlands,

Abstract: This thesis discussed the design, simulation and realization of multi-purpose sensor interface chip for the read-out of external sensor elements such as capacitors, platinum resistors, thermistors, resistive bridges and potentiometers

Huibert-Jan Verhoeven

Smart Thermal Flow Sensors, Delft University of Technology, The Netherlands

Abstract: Thesis presents the theory, simulation and realization of smart thermal flow sensors. A number of smart sensors featuring on-chip analog-to-digital conversion and bus interfacing capabilities are presented. The sensor application range from flow sensing in domestic applications to medical and industrial flow measuring and control.

Marian Bartek

Selective Epitaxial Growth for Smart Silicon Sensor Applications, Delft University of Technology, The Netherlands

Abstract: The thesis presents the theory, optimization and characterization of the selective epitaxial growth of silicon for application in smart silicon sensors. The potential of the technique is demonstrated in several applications.

Michal Jacek Rutka

Integrated Sensor Bus, Delft University of Technology, The Netherlands

Abstract: This thesis is devoted one of the most ambitious extensions of the smart sensor concept, i.e., the implementation of an integrated sensor bus interface. Both the flexible sensor bus data transmission protocol and the technology compatibility problems to be encountered during its implementation are investigated.

K.M. Mahmoud

Non-Linear A/D Converters for Integrated Silicon Smart Sensors, Delft University of Technology, The Netherlands

Abstract: The aim of this research was to develop a non-linear A/D converter that features a wide dynamic range (~10E15) and a resolution of about 8 bits. Further, in this research, the effect of the post-processing annealing and the epilayerthickness and doping concentrations on the DC bipolar characteristics were investigated.

Dave C. van Duyn

Frank Riedijk

Integrated Smart Sensors with Digital Bus Interface, Delft University of Technology, The Netherlands

Abstract: This thesis discusses the design of a bus controlled sensor interface environment. Standard sensor interface circuits are presented for resistive bridges, diodes, transistors and thermocouples. Indirect converters, among which, the popular sigma-delta converter are used for the A-to-D conversion of the signals. A number of calibration facilities, such as offset reduction by choppers are also discussed. Finally a simple sensor bus is used which is able to transmit a digital code, bitstream, analog voltage, frequency and a duty-cycle. All these circuits can be integrated together on a single chip.

Weijian Lian

Integrated Silicon Flip-Flop Sensors, Delft University of Technology, The Netherlands

Abstract: This thesis presents a class of silicon sensors, called flip-flop sensors. It is based on flip-flop circuitry, of which some components are replaced by elements that are sensitive to the parameter to be measured. Such sensor is activated by switching on the bias current, thus bringing the flip-flop into an unstable state. The flip-flop subsequently switches to one of the two stable states depending on the measurand. The on/off switching process is repeated many times. The number of resulting "ones" is a digital measure of the external parameter to be measured.

Volkov I.N.

Frequency Sensors Investigation and its Some Possibilities of Application, Ryazanskiy Radiotechnical Institute, USSR

Abstract: This thesis discusses different frequency sensors as well as frequency magnetic head for magnetic field sensor. It has high frequency stability (frequency output), noise immunity, linearity, sensitivity, speed and accuracy. The force and displacement sensors have been also designed. A possible application was a petroleum engineering.