Vol. 152, No. 5, May 2013, pp. 158-163

Abstract: To minimize hysteresis and creep for load cells which are force sensors, expensive materials and fabrication techniques have to be used instead of steel. It is advantageous to take a load cell of silicon because in contrast to metals, it does not suffer from hysteresis and creep. Another advantage of silicon is that standard micromachining techniques can be used and accurate micromachined resonant strain gauges can easily be integrated into the design. In this study, a comparative creep evaluation was made between the use of two standard techniques: ISO 376 and OIML R 60. The results indicate that also the silicon load cell (Si LC) - besides the low creep and hysteresis response - is sensitive to the method of applying the load. Therefore, this type of cell is more suitable for weighing equipment (balances) use.

Keywords: Silicon cell, creep, hysteresis, characterization

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