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Vol. 78, Issue 4, April 2007, pp. 1083-1092




Modeling Open-Loop MEMS Tunneling Accelerometer Based on Circular Plate


Hossein Jodat Kordlar1, Ghader Rezazadeh2

1, 2 Mech. Eng. Dept. Urmia University, Urmia, Iran

2Tel.: +98-914-145-1407, 2fax: +98-441-277-7022

2E-mail: g.rezazadeh@mail.urmia.ac.ir



Received: 6 February 2007   /Accepted: 20 April 2007   /Published: 23 April 2007


Abstract: In this paper open-loop MEMS tunneling accelerometer was modeled based on a clamped micro circular plate with a tip tunneling at its centre. Mechanical behavior of the micro plate was studied deriving governing equation based on classic Kirchhoff thin plate theory and it was discretized using Galerkin method. Dynamic response of the proposed accelerometer due to step and harmonic external excitation was studied and the magnitude of the applied acceleration was identified by measuring of the changing of tunneling current. Obtained results show that the proposed tunneling accelerometer very sensitive and it can be measure acceleration with very high resolution but very small gap of tip tunneling limit the range of measurable acceleration.


Keywords: MEMS, Tunneling, Accelerometer, Micro Plate, Dynamic response


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