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Vol. 78, Issue 4, April 2007, pp. 1108-1113




Application of SnO2 Nano-powder on MEMS Type Gas Sensors


E. Abbaspour-Sania, M. N. Azarmaneshb, M. Nasserib, Kh. Farhadic

a Department of Electrical engineering,

b Department of Physics, Faculty of science,

c Department of Chemistry, Faculty of science,

Urmia University, Urmia, Iran

E-mail: e.abbaspour@mail.urmia.ac.ir



Received:  4 February 2007   /Accepted: 20 April 2007   /Published: 23 April 2007


Abstract: This paper describes a cost effective and new method for preparing SnO2 sol-gel as the basic material for the Micro-Electro-Mechanical System (MEMS) type gas sensors. The SnO2 sol-gel was prepared by mixing SnCl4, propanol and isopropanol in a specified ratio. The produced sol-gel was exposed to two different decomposition temperatures of 600C and 1200C. Thermal treatment of the sol-gel resulted in formation of nano-crystalline single phase SnO2 powder having two different grain sizes. The grain size of the nano-powder calcinated at 600C was about 10 nm and increased to about 80nm when the treatment temperature increased to 1200C. The samples analyzed by XRD and TEM methods and both confirmed the grain size dependency on temperature. The prepared SnO2 sol-gels were applied on alumina substrates and the prepared samples were tested for sensitivity and selectivity using hydrogen, air and natural gas. The measurement results indicate a decrease in both selectivity and sensitivity of the gas sensor for increased nano-powder grain size.


Keywords: Semiconductor gas sensor, Sol-gel, Nanopowders, SnO2


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