Sensors & Transducers Journal
(ISSN 1726- 5479)
Vol. 78, Issue 4, April 2007, pp. 1108-1113
Application of SnO2 Nano-powder on MEMS Type Gas Sensors
E. Abbaspour-Sania, M. N. Azarmaneshb, M. Nasserib, Kh. Farhadic
a Department of Electrical engineering,
b Department of Physics, Faculty of science,
c Department of Chemistry, Faculty of science,
Urmia University, Urmia, Iran
Received: 4 February 2007 /Accepted: 20 April 2007 /Published: 23 April 2007
Abstract: This paper describes a cost effective and new method for preparing SnO2 sol-gel as the basic material for the Micro-Electro-Mechanical System (MEMS) type gas sensors. The SnO2 sol-gel was prepared by mixing SnCl4, propanol and isopropanol in a specified ratio. The produced sol-gel was exposed to two different decomposition temperatures of 600°C and 1200°C. Thermal treatment of the sol-gel resulted in formation of nano-crystalline single phase SnO2 powder having two different grain sizes. The grain size of the nano-powder calcinated at 600°C was about 10 nm and increased to about 80nm when the treatment temperature increased to 1200°C. The samples analyzed by XRD and TEM methods and both confirmed the grain size dependency on temperature. The prepared SnO2 sol-gels were applied on alumina substrates and the prepared samples were tested for sensitivity and selectivity using hydrogen, air and natural gas. The measurement results indicate a decrease in both selectivity and sensitivity of the gas sensor for increased nano-powder grain size.
Keywords: Semiconductor gas sensor, Sol-gel, Nanopowders, SnO2
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