Sensors & Transducers Journal
(ISSN 1726- 5479)
Vol. 78, Issue 4, April 2007, pp. 1127-1133
Study of Optical Humidity Sensing Properties of Sol-Gel Processed TiO2 and MgO Films
B. C. Yadav, N. K. Pandey
Sensors and Materials Research Laboratory
Department of Physics, University of Lucknow, Lucknow-226007, India
E-mail: email@example.com, firstname.lastname@example.org
Received: 24 February 2007 /Accepted: 20 April 2007 /Published: 23 April 2007
Abstract: Paper reports a comparative study of humidity sensing properties of TiO2 and MgO films fabricated by Sol-gel technique using optical method. One sensing element of the optical humidity sensor presented here consists of rutile structured two-layered TiO2 thin film deposited on the base of an isosceles glass prism. The other sensing element consists of a film of MgO deposited by same technique on base of the prism. Light from He-Ne laser enters prism from one of refracting faces of the prism and gets reflected from the glass-film interface, before emerging out from its other isosceles face. This emergent beam is allowed to pass through an optical fiber. Light coming out from the optical fiber is measured with an optical power meter. Variations in the intensity of light caused by changes in humidity lying in the range 5%RH to 95%RH have been recorded. MgO film shows better sensitivity than TiO2 film.
Keywords: Sol-gel process, Humidity sensors, Fresnel equations, Thin Films
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