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Vol. 81, Issue 7, July 2007, pp. 1364-1372




Effect of Residual Stress on Divergence Instability of Rectangular Microplate Subjected to Nonlinear Electrostatic Pressure



1Ghader Rezazadeh, 2Yashar Alizadeh, 3Hadi Yagubizade

1,3 Mech. Eng. Dept. Urmia University, Urmia, Iran,

Tel.: +98-914-145-1407,

2 Mech. Eng. Dept. Arak Azad University, Arak, Iran

E-mail: g.rezazadeh@mail.urmia.ac.ir



Received: 3 June 2007   /Accepted: 16 July 2007   /Published: 23 July 2007


Abstract: In this paper, the effect of residual stress on divergence instability of a rectangular microplate subjected to a nonlinear electrostatic pressure for different geometrical properties has been presented. After deriving the governing equation and using of Step-by-Step Linearization Method (SSLM), the governing nonlinear equation has been linearized. By applying the finite difference method (FDM) to a rectangular mesh, the linearized equation has been discretized. The results show, residual stresses have considerable effects on Pull-in phenomena. Tensile residual stresses increase pull-in voltage and compressive decrease it. The effect of different geometrical properties on divergence instability has also been studied.


Keywords: MEMS, Microplate, Residual stress, Divergence Instability, SSLM


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