Sensors & Transducers Journal
(ISSN 1726- 5479)
Vol. 81, Issue 7, July 2007, pp. 1364-1372
Effect of Residual Stress on Divergence Instability of Rectangular Microplate Subjected to Nonlinear Electrostatic Pressure
1Ghader Rezazadeh, 2Yashar Alizadeh, 3Hadi Yagubizade
1,3 Mech. Eng. Dept. Urmia University, Urmia, Iran,
2 Mech. Eng. Dept. Arak Azad University, Arak, Iran
Received: 3 June 2007 /Accepted: 16 July 2007 /Published: 23 July 2007
Abstract: In this paper, the effect of residual stress on divergence instability of a rectangular microplate subjected to a nonlinear electrostatic pressure for different geometrical properties has been presented. After deriving the governing equation and using of Step-by-Step Linearization Method (SSLM), the governing nonlinear equation has been linearized. By applying the finite difference method (FDM) to a rectangular mesh, the linearized equation has been discretized. The results show, residual stresses have considerable effects on Pull-in phenomena. Tensile residual stresses increase pull-in voltage and compressive decrease it. The effect of different geometrical properties on divergence instability has also been studied.
Keywords: MEMS, Microplate, Residual stress, Divergence Instability, SSLM
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