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Vol. 174, Issue 7, July 2014, pp. 1-7




Design of Piezoresistive MEMS Pressure Sensor Chip for Special Environments

1 Bo JIANG, 1 Xing-lin QI, 2 Jiakai LIU, 3 Bo JIA

1 Mechanical Engineering College, Shi Jia Zhuang, 050003, China
2 Equipment Engineering College, Armed Police Engineering University, Xian, 710086, China
3 Military Representative Bureau, Xian, 710054, China
1 Tel.: +86-0311-87994314, fax: +86-0311-87994314

E-mail: jn007jiang@gmail.com


Received: 20 February 2014 /Accepted: 30 June 2014 /Published: 31 July 2014

Digital Sensors and Sensor Sysstems


Abstract: To meet the pressure sensors used in special harsh environments, the MEMS piezoresistive pressure sensor design is proposed that the technology is more mature and more extensive used. The research of Piezoresistive sensor chip is done based on the analysis of sensor principle. The chip substrate material is selected combine with the special environment. The range sensor chip design is done based on small deflection theory and silicon material diaphragm piezoresistive effect theory. In order to avoid resonance modal analysis of the diaphragm is done. The force-sensitive resistor strip and its layout in the diaphragm is designed combine with the round diaphragm stress distribution. Semi-open-loop mode bridge is choice based on the comparison of advantages and disadvantages of three bridge modes. Given the special environment of vibration, acceleration sensitivity calculations must be done to adapt vibration environments for pressure sensor. Theory basis in sensor design is full, design projects and parameters combine with special environmental closely, and the research will have important significance for further study of special environmental pressure sensor.


Keywords: Special environment, Piezoresistive, MEMS, Pressure sensor, Force-sensitive resistor strip, Diaphragm.


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