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Vol. 176, Issue 8, August 2014, pp. 78-82




MEMS-based Low-g Inertial Switch

1 Shuangjie Liu, 1 Yongping Hao, 2 Suocheng Wang, 2 Dashun Li

1 School of Equipment Engineering, Shenyang Ligong University, Shenyang 110159, China
2 School of Mechanical Engineering, Shenyang Ligong University, Shenyang 110159, China
1 Tel.: 024-24680968

E-mail: shuangjieliu@126.com


Received: 20 May 2014 /Accepted: 31 July 2014 /Published: 31 August 2014

Digital Sensors and Sensor Sysstems


Abstract: In this paper, a novel MEMS-based switch is designed and characterized for the purpose of sensing the low g acceleration and output on-off signa1. The switch consists of an annular proof-mass suspended by helix spring that is fixed to the pedestal which located in center and connected with the bottom glass cover. The characteristic of the helix spring decides that the switch can sense the weak signal. The dynamic modeling of the design is obtained using finite element method (FEM) in the commercial code ANSYS. To verify the sensitivity and the reliability of the switch, the impact process is simulated, and the response time is calculated. The results show that the response time is short enough, the helix spring presents elastic deformation, and the switch can be used time after time. The modal analysis of the switch is carried out using finite element method in the case of constrained model, the inherent frequencies and mode shapes of the first 4 order modes are obtained respectively, and the analysis result gives a reference for switch design and us.


Keywords: MEMS, Inertial switch, Dynamic analysis, Finite element method, Mode analysis.


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