bullet Sensors & Transducers Journal

    (ISSN 1726- 5479)


2007 e-Impact Factor

25 Top Downloaded Articles

Journal Subscription 2008

Editorial Calendar 2008

Submit an Article

Editorial Board

Current Issue

Sensors & Transducers journal's cover


Sensors & Transducers Journal 2007

2000-2002 S&T e-Digest Contents

2003 S&T e-Digest Contents

2004 S&T e-Digest Contents

2005 S&T e-Digest Contents

2006 S&T e-Digest Contents


Best Articles 2007




Vol. 91, Issue 4, April 2008, pp.39-46




Flexible Membrane LRC Strain Sensor Fabricated using MEMS Method


Hee C. LIM1,*, James ZUNINO III2, and John F. FEDERICI1

1 New Jersey Institute of Technology, Physics Department, Tiernan Hall, 161 Warren St., Newark, NJ 07103-3537

2 U.S. Army RDE Command, AMSRD-AAR-AEE-P, Picatinny Arsenal, NJ 07806-4525

*Corresponding Author. e-mail: HCL4186@njit.edu



Received: 7 January 2008   /Accepted: 21 April 2008   /Published: 30 April 2008


Abstract: A new flexible inductor-resistor-capacitor (LRC) low-strain sensor design with conventional architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible polyimide substrate is fabricated. The sensing elements are queried wirelessly by an RF spectrum analyzer with tracking generator option installed. These low-strain sensors are subjected to repetitive strains/pressure testing. The LRC sensorís measured resonant frequency shifts reveal a 3rd degree polynomial loading relationship.


Keywords: Flexible substrate, Wireless strain sensor, Membrane


 Acrobat reader logo Click <here> or title of paper to download the full pages article (579 K)





1999 - 2008 Copyright ©, International Frequency Sensor Association (IFSA). All Rights Reserved.

Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - e-Shop - Membership

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - Site Map