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Vol. 188, Issue 5, May 2015, pp. 48-54




Design of Diaphragm Based MEMS Pressure Sensor with Sensitivity Analysis
for Environmental Applications

A. Nallathambi, T. Shanmuganantham

Pondicherry University, Pondicherry, 605014, India
Tel.: 91-9486122185

E-mail: nallathambiarjunan@gmail.com


Received: 10 April 2015 /Accepted: 11 May 2015 /Published: 29 May 2015

Digital Sensors and Sensor Sysstems


Abstract: In this paper Micro-electromechanical System (MEMS) diaphragm based pressure sensor for environmental applications is discussed. The main focus of this paper is to design, simulate and analyze the sensitivity of MEMS based diaphragm using different structures to measure the low and high pressure values. The simulation is done through the finite element tool and specifications related the maximum convinced stress; deflection and sensitivity of the diaphragms have been analyzed using the software INTELLISUITE 8.7v. The change in pressure is to bending of the diaphragm that modifies the measured displacement between the substrate and the diaphragm. This change in displacement gives the measure of the pressure in that environment. The design of these studies can be used to improve the sensitivity of these devices. Here the diaphragm based pressure sensor produced better displacement, sensitivity and stress output responses are obtained from the square diaphragm. The pressure range from 0.6 MPa to 25 MPa and its maximum displacement is accordingly 59 mm over a pressure range of 0 to 2 MPa. Its sensitivity is therefore 2.35 [10E-12/Pa].


Keywords: MEMS, Diaphragm, Pressure, Displacement, Stress and sensitivity.


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