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Vol. 192, Issue 9, September 2015, pp. 66-73




Surface Morphology, Compositional, Optical and Electrical Properties
of TiO2 Thin Films

S. S. Roy, A. H. Bhuiyan

Department of Physics, Bangladesh University of Engineering and Technology, Dhaka-1000, Bangladesh
Tel.: 88-01711983489

E-mail: ssroy2008@yahoo.com


Received: 31 August 2015 /Accepted: 28 September 2015 /Published: 30 September 2015

Digital Sensors and Sensor Sysstems


Abstract: Titanium oxide (TiO2) thin films have been deposited on to glass substrate by spray pyrolysis deposition technique (SPDT). The surface morphological, structural, electrical and optical properties of the as-deposited TiO2 thin films have been investigated as a function of substrate temperature (Ts). The scanning electron micrographs of as-deposited films showed uniform surface of TiO2 thin films. Elemental analysis clearly showed that the grains were typically comprised of both Ti and O in the thin films. Strong diffraction peaks (101) and (200) at 25 and 48 respectively indicating TiO2 in the anatase phase .The peaks were found to shift slightly from their standard positions at higher Ts, and there was some deviation in the lattice parameters. The crystallite size is found to be around 13 nm. The optical transmission of the thin films was found to increase from 73 to 89 % and the band gap energy shifts from 3.64 to 3.40 eV with increase of Ts. The room temperature dc electrical resistivity varies from 42 to 27 ohm.cm for the thin films grown at different Ts.


Keywords: TiO2, SPDT, Ts , Anatase, Optical band gap, dc electrical resistivity.


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