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Vol. 207, Issue 12, December 2016, pp. 30-35




Development of a Novel High Reliable Si-Based Trace Humidity Sensor Array
for Aerospace and Process Industry

1 Shuyao Zhou, 1 Q. C. Dao, 1 Biswajit Mukhopadhyay, 1 Piotr Mackowiak, 1, 4 Oswin Ehrmann, 1, 4 Klaus-Dieter Lang, 2 Michael Woratz, 2 Peter Herrmann, 1 T. Weiland,

3 Olaf Pohl, 3 Volker Noack, 1, 3, * Ha-Duong Ngo

1 Fraunhofer Institute of Reliability and Microintegration, Berlin, Germany
2 ACI GmbH, Berlin, Germany
3 University of Applied Sciences, Microsystems Engineering, Berlin, Germany
4 Technical University Berlin, Germany

* E-mail: ngo@izm.fraunhofer.de


Received: 5 November 2016 /Accepted: 5 December 2016 /Published: 30 December 2016

Digital Sensors and Sensor Sysstems


Abstract: In this paper we present high reliable and accurate silicon-based trace humidity sensors for use in aerospace and process industry. The sensors have been realized by using simple MEMS technology in this work. One is a single sensor (sensor cell) for monitoring of humidity, and sensor array is able to measure the total trace humidity in the atmosphere. Itís very suitable for aerospace and process industry such pharmacy applications.


Keywords: MEMS, Micro sensors, Humidity sensor.


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