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Vol. 225, Issue 9, September 2018, pp. 1-7




Study on Interferometric Stability Based on Modulating Frequency, Operating Wavelengths and Temperature
using an Electro Optic Multi-Wavelength Distance Sensor

* Sucheta SHARMA, Peter EISWIRT and Jürgen PETTER

AMETEK GmbH BU Taylor Hobson/Luphos, Rudolf-Diesel-Straße 16, D-64331, Weiterstadt, Germany
Tel.: +49 (0) 6150 543 1182

* E-mail: Sucheta.Sharma@ametek.com


Received: 25 June 2018 /Accepted: 31 August 2018 /Published: 30 September 2018

Digital Sensors and Sensor Sysstems


Abstract: The influence of modulating frequency, operating wavelengths and external temperature on the stability in distance measurement by an Electro Optic (EO) multi-wavelength distance sensor has been studied in this work. Previously, we reported the compatibility of EO phase modulation to replace the Piezoelectric Transducer (PZT) based mechanical phase modulation, for performing faster distance measurement in a multi-wavelength interferometer. Here, we have presented an extension of the previous work to investigate the cause of the distance drift observed for a new prototype of the EO sensor (having lower driving voltage requirement ~ 5 V) under 1.25 kHz and 5 kHz modulating frequency when the target was kept fixed. The results reflected that the measurement stability is independent of modulating frequency for the case of EO sensor compared to PZT which suffered from rapid distance change when it was made to operate at higher driving frequency. The drift of the four wavelengths from the diode laser source was between ~ 0.0001 - 0.0002 nm in 14 hours signifying their negligible effect on the observed distance change for the EO sensor. Furthermore, the synchronicity in the distance measurement by each of the employed wavelengths has been tested for the EO sensor at both 1.25 kHz and 5 kHz. Finally, the dependence of the change in measured distance on the external temperature has been studied and the result showed substantial correlation between the environmental temperature variation and the observed distance drift.


Keywords: Multi-Wavelength Interferometry, Interferometric stability, Phase modulation, Electro-Optic sensor, Distance measurement and metrology.


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