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Vol. 228, Issue 12, December 2018, pp. 84-86

 

Bullet

 

Comment on ‘Design of MEMS Cantilever - Hand Calculation’
[Sensors & Transducers Journal, Vol. 91, Issue 4, April 2008, pp. 55-69]
 

1 Manoj Kumar Dounkal, 2 R. K. Bhan

1 Solid State Physics Laboratory, Lucknow Road, Delhi–110054, India
2 Institute of Defence Scientists and Technologists, Brig SK Mazumdar Road, Delhi-110054, India
2 E-mail: bhan_rk2003@yahoo.com

 

Received: 27 August 2018 /Accepted: 1 October 2018 /Published: 31 December 2018

Digital Sensors and Sensor Sysstems

 

Abstract: Hand calculations and approximations for design of MEMS cantilevers by Kshirsagar, et al. 1 are very useful for the design of MEMS sensors but the approximations used by the authors are valid for beam loading of 5 % or less and are inadequate for moderate and full loading of the beam. The errors can be more than 50 % in extreme cases.

 

Keywords: Spring constants Cantilever, MEMS sensors.

 

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