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Vol. 229, Issue 1, January 2019, pp. 24-31




Study of Hydrogen Peroxide Vapors Sensor Made of Nanostructured Co-doped SnO2 Film

1 Vladimir AROUTIOUNIAN, 1 Valeri ARAKELYAN, 1 Mikayel ALEKSANYAN, 1 Gohar SHAHNAZARYAN, 1 Artak SAYUNTS and 2 Berndt JOOST

1 Yerevan State University, Department of Physics of Semiconductors and Microelectronics, 1 A. Manoogian St., Yerevan, 0025, Republic of Armenia
2 Institute for Pharmaceutical Technology, Fachhochschule Nordwestschweiz, Hochschule für Life Sciences, Gründenstrasse 40, CH-4132 Muttenz, Switzerland
1 Tel.: + 37460710311, fax: + 37460710355

1 E-mail: kisahar@ysu.am


Received: 30 November 2018 /Accepted: 31 December 2018 /Published: 31 January 2019

Digital Sensors and Sensor Sysstems


Abstract: A technology was developed for manufacturing the hydrogen peroxide vapors solid-state semiconductor sensor. Gas sensitive nanostructured films made of doped metal oxide SnO2 were manufactured by the high-frequency magnetron sputtering method. The chemical composition of prepared SnO2 targets was analyzed. The thickness of the deposited doped metal oxide film was measured. The morphology of the deposited Co-doped SnO2 film was studied by scanning electron microscopy. The sensor sensitivity to the different concentrations of hydrogen peroxide vapors was measured at different operating temperatures. It was found that the Co- doped SnO2 sensor exhibit a sufficient sensitivity to very low concentration of hydrogen peroxide vapors (875 ppb) at the operating temperature of 100 °C. It exhibits a sensitivity at low operating temperature (25 °C) when exposed to hydrogen peroxide vapors with a concentration greater than 3.5 ppm. The optimal performance was observed at the operating temperature of 150 °C. The sensor made of SnO2 had potential application in real samples for the implementation of medical diagnostic apparatus for use in determining low concentration of hydrogen peroxide vapors.


Keywords: Sensor, Nanostructured film, Semiconductor, Doped metal oxide, Hydrogen peroxide vapors.


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