Vol. 107, Issue 8, August 2009, pp. 86-91

Oxygen Sensing Properties of the WO₃ Thick Films

*^cR. S. KHADAYATE, ^bS. K. DISAWAL and ^aP. P. PATIL

^aDepartment of Physics, North Maharashtra University, Jalgaon 425 001, Maharashtra, India

Tel.: +91 0257 2257474

^bDr. A.G.D. Bendale Mahila Mahavidhyala, Jalgaon. 425 001, Maharashtra, India

Tel.: +91 0257 2252410

^cG.D.M. Arts, K.R.N. Commerce and M.D. Science College,

Jamner, Dist-Jalgaon, Maharashtra, India

Tel.: +91 0257 2263437

*E-mail: rskhadayate@yahoo.com, disawalsk@yahoo.co.in, pnmu@yahoo.co.in

Received: 16 May 2009   /Accepted:  15 August 2009   /Published: 25 August 2009

Abstract: This paper presents oxygen gas sensing properties of WO₃ thick films. In this work, the WO₃ thick films were prepared by standard screen-printing method. These films were characterized by X-ray diffraction (XRD) measurements and scanning electron microscopy (SEM). The oxygen gas sensing properties of these thick films were investigated at different operating temperatures and oxygen gas concentrations. The WO₃ thick films exhibit excellent oxygen sensing properties with a maximum sensitivity of ~ 35.75 % at 350 ^oC in air atmosphere with fast response and recovery time.

Keywords: WO₃ thick film, Screen printing, Oxygen gas

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