Vol. 108, Issue 9, September 2009, pp. 31-39

Dynamic Characterization of MEMS Scanners

¹Çağlar ATAMAN, ¹Hüseyin R SEREN, ²Harald SCHENK, ¹Hakan ÜREY

¹Koç University, Electrical Engineering and Optical Microsystems Laboratory,
34450 Istanbul, Turkey

² Fraunhofer-IPMS, Maria-Reiche-Str. 2 01109 Dresden, Germany

¹Tel.: + 902123381474, + 902123381548,

E-mail: hurey@ku.edu.tr

Received: 17 July 2009   /Accepted:  21 September 2009   /Published:  28 September 2009

Abstract: A simple yet precise optical characterization technique for beam scanning devices is proposed. The method uses a single photodetector to measure various dynamic characteristics of scanning devices, including frequency, scan angle, scan phase, and the mechanical quality factor, given that the scan waveform is known. A quantitative performance analysis and a set of experimental characterization results are presented. Experimentally 0.007 % scan angle measurement accuracy is demonstrated and it is shown that it can be improved.

Keywords: MEMS, Scanner characterization

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