Sensors & Transducers Journal
(ISSN 1726- 5479)
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205.767 |
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(ISSN 1726- 5479) |
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Sensors & Transducers Journal 2008 Sensors & Transducers Journal 2007 2000-2002 S&T e-Digest Contents
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Vol. 109, Issue 10, October 2009, pp. 38-46
Palladium Surface Modification
of Nanocrystalline Sol-Gel Derived Zinc Oxide Thin Films
and its Effect on Methane
Sensing
*1P. BHATTACHARYYA, 2S. MAJI, 2S. BISWAS, 2A. SENGUPTA, 2T. MAJI, 2H. SAHA
1Department of Electronics and Telecommunication Engineering,
Bengal Engineering and Science University,
Shibpur- 711103, Howrah, India
2 IC Design and Fabrication Center,
Department of Electronics and Telecommunication Engineering,
Jadavpur University, Kolkata- 7000032, India
* Tel.: +91332668456, fax: +913326682916
E-mail: pb_etc_besu@yahoo.com
Received: 10 September 2009 /Accepted: 24 November 2009 /Published: 30 November 2009
Abstract: Nanocrystalline n-ZnO thin films were deposited on SiO2-coated p-Si substrates by a sol-gel method to fabricate ZnO-based resistive sensors. Two types of sol-gel ZnO based sensor structure, one as deposited and other with surface modified by palladium were investigated for methane sensing. The response magnitude, response time and recovery time were studied in the temperature range of 100-350 °C and at methane concentrations of 0.01 %, 0.05 %, 0.1 %, 0.5 %, 1 % and 1.5 % for both the sensor structure. The Pd modified sol-gel ZnO based sensor was found to provide lower operating temperature (150 °C), lower response (recovery) time, higher response magnitude and higher sensing range for methane compared to its earlier reported unmodified counterpart (250 °C). With Pd modification ZnO was found to sense methane concentration as low as 0.01 % and as high as 1.5 % whereas for unmodified one this range was restricted between 0.1 % to 1.0 %.
Keywords: Nanocrystalline Zinc Oxide, Sol-gel, Pd surface modifier, Pd (Ag) catalytic contacts, Methane detection
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