bullet Sensors & Transducers Journal

    (ISSN 1726- 5479)

205.767

2008 e-Impact Factor

25 Top Downloaded Articles

Journal Subscription 2010

Editorial Calendar 2010

Submit an Article

Editorial Board

Current Issue

Sensors & Transducers journal's cover

Sensors & Transducers Journal 2008

Sensors & Transducers Journal 2007

2000-2002 S&T e-Digest Contents

2003 S&T e-Digest Contents

2004 S&T e-Digest Contents

2005 S&T e-Digest Contents

2006 S&T e-Digest Contents

 

Best Articles 2008

 

 

 

Vol. 111, Issue 12, December 2009, pp. 58-64

 

Bullet

 

Design of RF MEMS Switch with High Stability Effect at the Low Actuation Voltage

 

Bandana MISHRA, Rajiv PANIGRAHI, Z. C. ALEX

School of Electrical Sciences, VIT University, Tamilnadu-632014, India

E-mail: bandanavit@gmail.com

 

 

Received: 1 September 2009   /Accepted:  22 December 2009   /Published:  30 December 2009

 

Abstract: MEMS switches are one of the most promising future micro-machined products that have attracted numerous research efforts in recent years. This paper presents an innovative design of RF MEMS switch, with low actuation voltage (VT), improved mechanical stability and reduced stiction. The proposed switch is fabricated on a coplanar waveguide (CPW) & actuated by electrostatic force. The mechanical and electrical performance of the switch has been tested. The simulation results show that the actuation voltage can be reduced by using serpentine folded spring, and improved mechanical stability and reduced stiction can be achieved by using a hydrophobic material with high Young’s modulus as insulator in between top and bottom electrode. The measured pull-in voltage is 4 V.

 

Keywords: MEMS, Micro-machined, Switches, Actuation voltage, Stability

 

Acrobat reader logo Click <here> or title of paper to download the full pages article (800 Kb)

 

 

 

 


1999 - 2009 Copyright ©, International Frequency Sensor Association (IFSA). All Rights Reserved.


Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - Membership - Submit Press Release

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - e-Shop - Site Map