On-line Magazine 'Sensors & Transducers' (S&T e-Digest)
(ISSN 1726- 5479)
Vol. 66, Issue 4, April 2006, pp. 526-533
Pull-In Voltage of Fixed-Fixed End Type MEMS Switches with Variative Electrostatic Area
Hamed Sadeghian, Ghader Rezazadeh, Ehsan Malekpour, Ayla Shafipour
Mechanical Engineering Department, Urmia University, Urmia, IRAN
Tel. +98-914-145-1407, fax. +98-441-277-7022
E-mail: Hamed.email@example.com firstname.lastname@example.org
Received: 28 January 2006 Accepted: 21 April 2006 Published: 25 April 2006
Abstract. In this paper we developed a new approach to calculation of pull-in voltage of fixed-fixed end type MEMS switches. In the previous works Pull-in voltage has been calculated on a lumped model, when one of them used a distributed model by assuming the electrostatic area is applied the whole of the surface of the beam. In the present work, we used a distributed model to determinate the pull-in voltage. To do this the nonlinear governing equation of the beam with non-uniform electrostatic pressure that applied in the part of beam has been derived. The derived nonlinear equation has been solved numerically and has been showed that the results of our approach are more accurate than the other previous works.
Keywords: MEMS, distributed model, electrostatic pressure
Click <here> or title of paper to download the full pages article (203 K)
1999 - 2006 Copyright ©, International Frequency Sensor Association (IFSA). All Rights Reserved.
Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - e-Shop - Membership
Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - Site Map