Sensors & Transducers Journal (ISSN 1726- 5479) |
|
Sensors & Transducers Journal 2010 Sensors & Transducers Journal 2009 Sensors & Transducers Journal 2008 Sensors & Transducers Journal 2007 2000-2002 S&T e-Digest Contents
|
||
|
Vol. 125, Issue 2, February 2011, pp.247-255
A SAW Delay Line Sensor Combined with Micro-hotplate for Bio-chemical Applications
Department of Electrical Engineering
Sahand University of Technology,
E-mail: b_vosoughi@sut.ac.ir, badri@sut.ac.ir
Received: 28 December 2011 /Accepted: 15 February 2011 /Published: 28 February 2011
Abstract: This paper presents a SAW delay line sensor for chemical and biological applications. The impulse response model is used for determination of IDT parameters and first order investigation. A three-dimensional finite element model of a SAW delay line on a silicon membrane with an AlN thin film is simulated. An additional micro-hotplate is combined with SAW system for thermal adjustment of sensing layer on required temperature and thermal stabilization for whole sensor. The designed SAW system works at 618 MHz with adequate wave confinement at the surface of the device. QUOTE S21 parameter and phase response of the sensor is calculated by applying an impulse signal to the sensor.
Keywords: SAW delay line, Bio-chemical sensor, Finite element analysis, Micro-hotplate
Click <here> or title of paper to download the full pages article (1.3 Mb)
Read more about Biosensors
|
1999 - 2011 Copyright ©, International Frequency Sensor Association (IFSA). All Rights Reserved.
Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - Membership - Submit Press Release - Twitter
Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - e-Shop - Site Map - Video