bullet On-line Magazine 'Sensors & Transducers' (S&T e-Digest)

    (ISSN 1726- 5479)


25 Top Downloaded Articles

Submit an Article

Editorial Board

S&T Journal's cover

2000-2002 S&T e-Digest Contents

2003 S&T e-Digest Contents

2004 S&T e-Digest Contents

2005 S&T e-Digest Contents




Vol. 70, Issue 8, August 2006, pp. 655-660




A Novel Structure for MEMS Based Varactors


Ebrahim Abbaspour-Sani, Naser Nasirzadeh, G.Dadashzadeh

Department of the electrical engineering, Urmia University, Urmia Iran

Fax: +98 441 345 1037, E-mail: e.abbaspour@mail.urmia.ac.ir



Received: 30 July 2006   /Accepted: 22 August 2006   /Published: 27 August 2006


Abstract. A novel structure with electro-mechanically tunable capacitor for RF application is presented. The suspended electrodes are designed in such a way that both are electrostaticaly displaceable. This double plate moveability feature of the capacitor increases the tuning range. In this structure, there is no need for cantilever beams, which introduce considerable series resistance to the capacitor and decrease the quality factor. Therefore, our proposed varactor achieves better Q in a smaller area. The simulated one pF capacitor shows a Q of 40 at 1 GHz and a tuning range of 42%. Pull-in voltage is 3.6 V, which is a reasonable value for submicron CMOS technologies.


Keywords: RF-MEMS, high-Q, tunable capacitors, electrostatic


Acrobat reader logo Click <here> or title of paper to download the full pages article (260 K)





1999 - 2006 Copyright , International Frequency Sensor Association (IFSA). All Rights Reserved.

Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - e-Shop - Membership

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - Site Map