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Vol. 15, Special Issue, October 2012, pp. 14-21


Selected papers from Nanotech Conference & Expo (NanoTech' 2012),
18-21 June 2012, Santa Clara, California, USA




Research on Nonlinear Vibration in Micro-machined Resonant Accelerometer


Shuming ZHAO, Yunfeng LIU, Fan WANG, Jingxin DONG

Department of Precision Instruments and Mechanology,

Tsinghua University, 100084, Beijing, China,

Tel.: +86-15116987074, fax: +86-10-62792119

E-mail: Shuming.Zhao.CN@gmail.com



Received: 14 September 2012   /Accepted: 1 October 2012   /Published: 8 October 2012

Digital Sensors and Sensor Sysstems


Abstract: This paper analyzes the nonlinear vibration of the Micro-machined Resonant Accelerometer (MRA) by system modeling and simulation. The optimization designs to weaken the influence of the nonlinear vibration are proposed. With decreasing the mechanism dimension of the MRA, the effects of the nonlinear vibration become more obviously. The nonlinear vibration affects the precision and system stability of the micro-machined resonant accelerometer. The simulation results of the nonlinear system are well consistent with the experiments, and predict that the optimizing structure will effectively weaken the nonlinear effect.


Keywords: Micro-machined resonant accelerometer, Nonlinear vibration, Duffing equation, Optimizing structure



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