Sensors & Transducers Journal (ISSN 1726- 5479) |
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Sensors & Transducers Journal 2007 2000-2002 S&T e-Digest Contents
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Special Issue: Modern Sensing Technologies
Vol. 90, April 2008, pp. 221-232
MEMS Based Pressure Sensors – Linearity and Sensitivity Issues
1Jaspreet Singh, 1K. Nagachenchaiah, 2M. M. Nayak
1Semiconductor
Laboratory(SCL), Dept. of Space, Punjab, India
2Liquid
Propulsion System Centre (LPSC), ISRO, Dept. of Space, Bangalore, India
E-mail: jaspreet@sclchd.co.in, chen@sclchd.co.in, mmnayak@gmail.com
Received: 15 October 2007 /Accepted: 20 February 2008 /Published: 15 April 2008
Abstract: This paper describes the various nonlinearities (NL) encountered in the Si-based Piezoresistive pressure sensors. The effect of various factors like diaphragm thickness, diaphragm curvature, position of the piezoresistors etc. is analyzed taking anisotropy into account. Also, the effect of modified bending stiffness due to presence of oxide/nitride used for isolation between metal and diaphragm is studied from linearity point of view.
Keywords: Pressure sensor, Sensitivity, Linearity, Piezoresistance, Wheatstone bridge
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