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Vol. 27, Special Issue, May 2014, pp. 156-160




Structural, Optical and Electrical Properties of Transparent Conducting Oxide Based on Al Doped ZnO Prepared by Spray Pyrolysis

Abdeslam DOUAYAR, Hassan BIHRI, Ahmed Mzerd, Azzam, BELAYACHI and 1 Mohammed ABD-LEFDIL

Université Mohammed V-Agdal, Faculté des Sciences, LPM, B.P. 1014, Rabat, Morocco
Tel./fax: +212 (0) 537778973

E-mail: a-lefdil@fsr.ac.ma


Received: 31 December 2012 /Accepted: 10 August 2013 /Published: 26 May 2014

Digital Sensors and Sensor Sysstems


Abstract: Aluminum doped zinc oxide (AZO) thin films were deposited on glass substrates at 350 °C by spray pyrolysis technique. X-ray diffraction patterns show that the undoped and AZO films exhibit the hexagonal wűrtzite crystal structure with a preferential orientation along 2 direction. AFM images showed that AZO film with 3 % of Al has a uniform grain sizes with a surface roughness of about 24 nm. All films present a high transmittance in the visible range. Both undoped and AZO films were n-type degenerate semiconductor and the best electrical resistivity value was around 8.0 ´ 10- 2 W.cm obtained for 3 % Al content.


Keywords: Al-doped zinc oxide, Sprayed thin films.


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