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Vol. 27, Special Issue, May 2014, pp. 225-232




Investigation of Metrological Performance of the ISFET-Based pH Sensors

1 Sergey LOZOVOY, 1 Alexander KUKLA, 1 Alexey PAVLUCHENKO

1 Institute of Semiconductor Physics of NASU, Kiev, pr-t Nauki 41, 03028, Ukraine
Tel.: +380-44-525-5478

E-mail: kukla@isp.kiev.ua


Received: 23 November 2013 /Accepted: 12 January 2014 /Published: 26 May 2014

Digital Sensors and Sensor Sysstems


Abstract: The metrological performance characteristics of the dual channel p-type ISFET pH sensors with silicon nitride sensitive layer are investigated. The simplified three-lead sensor design and corresponding signal readout circuit are employed and the sensor transform function is evaluated as dependency of the ISFET channel current on the analyzed solution pH. It is shown that achievable pH measurement accuracy is sufficient for use of the developed sensors in typical laboratory applications in either single channel or differential mode of operation, as alternative to the traditional glass electrodes.


Keywords: Ion-sensitive field effect transistor, ISFET, Biosensor, pH Measurement, Sensitivity, Accuracy


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