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Vol. 27, Special Issue, May 2014, pp. 269-276

 

Bullet

 

A Versatile Technology Based on Deep Reactive Ion Etching and Anodic Bonding for the Application
of Micromixers and Microfilters
 

1, 2 Safae MERZOUK, 1 Michael LEE, 3 Maria J. LOPEZ-MARTINEZ, 1 Nadia ZINE, 4 Abdelhamid ELAISSARI, 4 Chiraz JAAFAR MAALEJ, 2 Mohamed AGOUZOUL, 5 Mourad TAHA JANAN, 3 Jose A. PLAZA, 1 Nicole JAFFREZIC-RENAULT, and 1 Abdelhamid ERRACHID

1 Université de Lyon, Institute des Sciences Analytiques (ISA) UMR 5280, 5 rue de la Doua Villeurbanne Cedex, 69100, France
2 Université Mohamed V Agdal, Ecole Mohammadia d’Ingénieurs, ERD3M, avenue Ibn Sina, BP 765, Rabat, Morocco
3 Instituto de Microelectronica de Barcelona, IMB-CNM (CSIC), Campus UAB, 08193, Bellaterra, Barcelona, Spain
4 Université de Lyon, Laboratoire d'Automatique et de Génie des Procédés (LAGEP) – UMR 5007, 43 boulevard du 11 novembre 1918, 69622, Villeurbanne, France
5 Université Mohamed V Souissi, Ecole Normale Supérieure de l'Enseignement Technique, 10100 Rabat Morocco
1 Tel.: +33 (0) 4 37 42 35 60, fax: +33 (0) 4 37 42 37 00

1 E-mail: safae_merzouk@yahoo.fr, abdelhamind.errachid@univ-lyon1.fr

 

Received: 23 November 2013 /Accepted: 12 January 2014 /Published: 26 May 2014

Digital Sensors and Sensor Sysstems

 

Abstract: A technology for the fabrication of silicon micromixers and microfilters is presented with their applications being analyzed. The versatility of this technology is observed with the use of two different photolithographic masks where active microfluidic components have been developed. The silicon micromixers and microfilters were developed and manufactured by photolithography (PL) and deep-reactive ion etching (DRIE) and then bonded onto sand-blasted glass wafers by anodic bonding. The fluidic flow within the specialized microchannel was observed under an optical microscope with micromixing using two differently colored dyes and the microfiltration of poly (D, L lactic-co-glycolic acid) microparticles (MP-PLGA) for size-sorting and separation Finally, the microfiltering device was injected with a whole blood sample for the separation of larger leukocyte cells.

 

Keywords: Deep Reactive Ion Etching, Anodic Bonding, Silicon, Micromixer, Microfilter.

 

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