Bullet Resonant Sensors

 

 

Articles, Papers and References

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1.

C.J. Welham, J. Greenwood and M. Bertioli, A  Lateral Resonant Pressure Sensor Fabricated Via Fusion Bonding, Wafer Thinning and Reactive-Ion-Etching, In Proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Southampton, UK, 13-16 September 1998, EUROSENSORS XII, Ed. by N. M. White, Institute of Physics Publishing Bristol and Philadelphia, Sensors Series, volume 1, pp.353-356.

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Thierry Corman, Peter Enoksson, Kjell Norén and Göran Stemme, Novel Burst Technology for Closed Loop Detection and Exitation of Resonant Silicon Sensors,  In Proceedings of the 10th International Conference on Solid-State Sensors and Actuators (Transducers '99), Sendai, Japan, 7-10 June, 1999, vol.2, pp.1402-1405.

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D. Scholz, E. Peiner, A. Schlachetzki, H. Fritsch, R. Mikuta, P. Hauptmann, A smart resonant sensor fabricated by Si-MST for online vibration control of rotating machinery, Proc. 26th Europ. Solid State Dev. Res. Conf. (ESSDERC '96), Bologna (Italy), 9.-11. Sept. 1996, edited by G. Baccarani and M. Rudan, (Editions Frontiйres, Gif-sur-Yvette, France, 1996), 721-724.

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V. Ferrary, D.Marioli, A. Taroni, E. Ranucci, Multisensor Array of Mass Microbalances for Chemical Detection Based on Resonant Piezo-Layers of Screen-Printed PZT, In Proceedings of the 13th European Conference on Solid-State Transducers (EUROSENSORS XIII), The Hague, The Netherlands, 12-15 September, 1999, pp.949-952.

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Catherine Bernou, Dominique Rebière, Jacques Pistré, New Chemical Sensors Using Microwave Resonators, In Proceedings of the 13th European Conference on Solid-State Transducers (EUROSENSORS XIII), The Hague, The Netherlands, 12-15 September, 1999, pp.635-638.

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M.Penza, G.Cassano, Relative Humidity Sensing by PVA-Coated Dual Resonator SAW Oscillator, In Proceedings of the 13th European Conference on Solid-State Transducers (EUROSENSORS XIII), The Hague, The Netherlands, 12-15 September, 1999, pp.133-136.

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A.L. Dring and B.E. Jones, Integrated On-line Multisensing of Fluid Flow Using a Mechanical Resonator, In Proceedings of the 13th European Conference on Solid-State Transducers (EUROSENSORS XIII), The Hague, The Netherlands, 12-15 September, 1999, pp.883-886.

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Jürgen Wibbeler, Carmen Steiniger, Matthias Küchler, Klaus Wolf, Tino Frank, Jan Mehner, Wolfram Dötzel, Thomas Gessner, Resonant Silicon Vibration Sensors with Voltage Controlled Frequency Tuning Capability, In Proceedings of the 13th European Conference on Solid-State Transducers (EUROSENSORS XIII), The Hague, The Netherlands, 12-15 September, 1999, pp.791-794.

9. Folder icon Haueis M., Dual J., Cavalloni C., Gnielka M., Buser R., Packaged bulk micromachined resonant­force sensor for high temperature applications, SPIE - Design, Test, Integration and Packaging of MEMS/MOEMS, Paris, May 2000, vol. 4019, 2000, pp. 379-388.

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M. Haueis, J. Dual, R. A. Buser, High Temperature Resonant Silicon Force and Pressure Sensor
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B. Dulmet, Design of Frequency Output Resonant Piezoelectric Sensors, Proceedings of SPIE/Ukraine on Current Research in Optics and Photonics: Selected Papers from the 2nd International Conference on Advanced Optoelectronics & Lasers (2005), 12 -17 September 2005, Yalta , Crimea, Ukraine, Ed. by I. A. Sukhoivanov, V. A. Svich, Y. S. Shmaliy, S. A. Kostyukevych, Vol. 6, No. 1-6, 2006, pp.445-452.

 

 

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