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Vol. 82, Issue 8, August 2007, pp.1480-1485




Development of a Micro-SPM (Scanning Probe Microscope) by Post-Assembly of a MEMS-Stage and an Independent Cantilever


Zhi Li, Helmut Wolff, Konrad Herrmann

Physikalisch-Technische Bundesanstalt, 38112 Braunschweig, Germany

Tel: 49-531-592 5148, fax: 49-531-592 5105, E-mail: Zhi.Li@ptb.de



Received: 1 June 2007   /Accepted: 20 August 2007   /Published: 27 August 2007


Abstract: The development of miniature scanning probe microscopes (SPM) on  the basis of the MEMS technique has gained more and more interest. Here a novel approach is presented to realize a micro-SPM, in which by means of post-assembly a conventional cantilever is mounted onto a MEMS positioning stage and used to detect the topography variation of the surface under test. Compared with other integrated micro-SPMs, the proposed micro-SPM can maintain the lateral resolution by simply renewing its cantilever in use, and therefore features low cost, practicability and longer lifetime. Preliminary experimental results are reported, which demonstrate that the proposed microSPM can be realized.


Keywords: Scanning probe microscope, MEMS stage, cantilever, optical deflection detecting


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