Vol. 85, Issue 11, November 2007, pp.1708-1713

Focused Ion Beam Nanopatterning for Carbon Nanotube Ropes Based Sensor

Vera LA FERRARA, Ivana NASTI, Brigida ALFANO, Ettore MASSERA and Girolamo DI FRANCIA

ENEA, Portici Research Center, Località Granatello 80055 Portici (NA)

E-mail: vera.laferrara@portici.enea.it

Received: 13 March 2007   /Accepted: 20 November 2007   /Published: 26 November 2007

Abstract: Focused Ion Beam (FIB) technology has been used to realize electrode patterns for contacting Single Walled Carbon Nanotubes (SWCNTs) ropes for chemical gas sensor applications. Two types of transducers, based on a single rope and on bundles, have been realized starting from silicon/Si₃N₄ substrate. Electrical behaviour, at room temperature, in toxic gas environments, has been investigated and compared to evaluate contribution of a single rope based sensor respect to bundles one. For all the devices, upon exposure to NO₂ and NH_3, the conductance has been found to increase or decrease respectively. Conductance signal is stronger for sensor based on bundles, but it also evident that response time in NO₂ is faster for device based on a single rope. FIB technology offers, then, the possibility to contact easily a single sensitive nanowire, as carbon nanotube rope.

Keywords: Focused ion beam, Nanopatterning, Chemical gas sensor, SWCNTs Rope

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