Vol. 85, Issue 11, November 2007, pp.1714-1720

Trace Moisture Response Property of Thin Film Nano Porous g- Al₂O₃ for Industrial Application

Debdulal Saha, Kamalendu Sengupta^*

Sensor and Actuator Section, Central Glass & Ceramic Research

Institute, Jadavpur, Kolkata-700 032, India

E-mail: *kamalendusengupta@yahoo.co.in, debdulal76@yahoo.co.in

Received: 11 July 2007   /Accepted: 20 November 2007   /Published: 26 November 2007

Abstract: Nano porous thin film g-Al₂O₃ is prepared by sol-gel method by heat treating process at 550⁰C.The samples are made of various coating thickness and investigated as trace moisture sensor at room temperature within the range of –72⁰C to –42⁰C dew point (DP). It is found that at a particular coating thickness the sensitivity and response time are found to be suitable for commercial application. The capacitance change over the dew point (DP) range from –72⁰C to –42⁰C is found to be prominent for making a sensitive device.

Keywords: Thin film, Nanopore, g-Al₂O₃, Coating thickness, Suitable for making device

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