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Vol. 86, Issue 12, December 2007, pp.1816-1822




Flexible Membrane Micro Flow-rate Threshold Flow Sensor


*Hee C. LIM, Sheng LIU, Gordon THOMAS and John F. FEDERICI

New Jersey Institute of Technology, Physics Department,

Tiernan Hall, 161 Warren St., Newark, NJ 07103-3537, USA

*E-mail: HCL4186@njit.edu



Received: 8 November 2007   /Accepted: 20 December 2007   /Published: 26 December 2007



Abstract: A piezoresistive flow sensor that functions as a threshold flow switch, independent of input supply voltage, is designed, fabricated, and tested. The test flow rate is in the 10s ml/hr range. The sensor is fabricated using doped hydrogenated amorphous silicon thin film with MEMs on flexible polyimide substrate.  The flow sensor is highly sensitive and able to distinguish between distilled water and 0.1 % NaCl saline solution in terms of threshold switch-on flow rate. The switch-on threshold of the flow sensor is observed to be independent of the applied input voltage. These turn-on threshold levels are adaptable to userís application.


Keywords: Flexible substrate, Micro flow rate sensor


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