Vol. 86, Issue 12, December 2007, pp.1823-1831

Design, Fabrication and Performance Simulation for MEMS Based Piezo-Resistive Pressure Transducers

with Sensitivity and Temperature Dependency

¹Madhurima CHATTOPADHYAY, ²Swapan DAS,  ³Mita DUTTA

¹ ECE Deptt., Netaji Subhash Engineering College, Kolkata

Tel.: (033) 24363333/1285, fax: (033) 2436-1286

E-mail: madhurima_ch@yahoo.com

² AEIE Deptt, Bankura Unnayani Institute of Engineering, Bankura

Tel.: (03242) 255955, E-mail: swapan.das@rediffmail.com

³ EE Deptt., Jadavpur University, Kolkata

Tel.: (033) 24146949, E-mail: mita_dutta@hotmail.com

Received:15 October 2007   /Accepted: 20 December 2007   /Published: 26 December 2007

Abstract: The present paper describes the design, fabrication and performance of surface micromachined piezo resistive type pressure sensors. The sensors are square and circular shaped. In the first case the piezo resistive material in the form of a wire is placed on the top of a square shaped as well as circular shaped diaphragm and in the second case the wire is embedded within the two different structures.

Fabrication process follows the technique of surface micromachining. After successful completion of fabrication the structures are finally prepared for different static analysis. The I/O characteristic of the pressure sensors changes with ambient temperature. If current density of the piezo resistive material is changed there is a change in temperature which is nothing but the conversion of electrical dissipation to heat due to electrical current flowing across an interface. The deflections of the diaphragms (for square as well as circular) have also been studied for different applied pressure. From this, the operating range as well as the sensitivity of the sensors can be easily calculated. A detailed analysis of the potential with different applied pressure is presented graphically. The simulation of the proposed sensor has been carried out using Intellisuite™ software.

Keywords: MEMS Based Piezo-Resistive Pressure Transducers; Pressure sensors; Surface micromachining, MEMS

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