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Vol. 92, Issue 5, May 2008, pp. 16-23




Small-angle Sensor Based on the SPR Technology and Heterodyne Interferomery


Shinn-Fwu Wang 1,*, Ming-Hung Chiu2, Lih-Horng Shyu2, Rong-Seng Chang3

1,* Department of Electronic Engineering, Ching Yun University, No.229, Chien-Hsin Rd., Jhongli City, Taoyuan, 320, Taiwan, R.O.C.

2 Department of Electro-Optical Engineering, National Formosa University, No. 64, Wunhua Road, Huwei Yunlin 632, Taiwan, R.O.C.

3 Institute of Optical Sciences, National Central University,No.300, Jhongda Rd., Jhongli City, Taoyuan, 320, Taiwan, R.O.C.

*Tel.: +886-3-4581196 ext 5113; E-mail address: sfwang@cyu.edu.tw



Received: 31 March 2008   /Accepted: 20 May 2008   /Published: 26 May 2008


Abstract: A small-angle sensor based on the surface plasmon resonance (SPR) technology and heterodyne interferometry is proposed. In the paper, we try to measure the phase difference variation between s and p polarizations due to attenuated total reflection (ATR). The phase difference variation depends on the incident angle. Therefore, only evaluating the phase difference variation can perform small-angle measurement.  The resolution of the method can reach 2.4 x 10-7 radian. The method has some merits, e.g., a simple optical setup, easy operation, high measurement accuracy, high resolution, rapid measurement, and high stability etc. And its feasibility is demonstrated.


Keywords: Surface plasmon resonance (SPR), Heterodyne interferometry (HI), Small-angle measurement


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