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Vol. 238, Issue 11, November 2019, pp. 16-20




Scanning Electron Microscopy Imaging of Acoustic Wave Fields Distribution in QCM

1, * Dmitry ROSHCHUPKIN, 1 Evgenii EMELIN, 1 Olga PLOTITCYNA and 2 Sergei SAKHAROV

1 Institute of Microelectronics Technology and High Purity Materials Russian Academy of Sciences, Chernogolovka, Moscow Region, 142432, Russia
2 FOMOS Materials Co., Buzheninova St. 16, Moscow, 105023, Russia
1 Tel.: +74965244058, fax: +74965244225

* E-mail: rochtch@iptm.ru


Received: 30 August 2019 /Accepted: 15 October 2019 /Published: 30 November 2019

Digital Sensors and Sensor Sysstems


Abstract: The acoustic properties of QCM microbalances based on a La3Ga5SiO14 crystal (LGS) were studied using scanning electron microscopy technique. Scanning electron microscopy method in the low-energy secondary electron emission mode makes it possible to visualize the distribution of the acoustic wave field in the QCM (distribution of nodes and antinodes of standing bulk acoustic wave in crystal) in the real time mode.


Keywords: La3Ga5SiO14 crystal, Scanning electron microscopy, Bulk acoustic waves, QCM, Microbalance.


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