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Vol. 239, Issue 12, December 2019, pp. 34-40




Non-invasive Optical Pressure Sensing using a Scalable Reflective Polydimethylsiloxane Membrane

1 Vitor A. V. ROSSI, 1, 2 and * Michael A. CARPENTER

1 SUNY Polytechnic Institute, College of Nanoscale Science and Engineering, 257 Fuller Road, Albany NY, 12203, USA
2 SUNY Polytechnic Institute, College of Engineering, 100 Seymour Rd, Utica NY, 12203, USA
E-mail: mcarpenter@sunypoly.edu


Received: 17 October 2019 /Accepted: 20 November 2019 /Published: 9 December 2019

Digital Sensors and Sensor Sysstems


Abstract: Thin polydimethylsiloxane (PDMS) membranes have been employed as an optical reflectance-based pressure sensor. A unique PDMS membrane transfer method has been utilized using a polystyrene coated silicon wafer which allows for multiple uses and ease of scalable manufacturing of the device structures. The device is produced using the transfer method and common PDMS preparation and bonding techniques onto a glass substrate. Light intensity reflected off the membrane is recorded as pressure in the sensing environment changes, and a measurable reflectance intensity change is detected with a photodiode. Device testing in both dry and humid environments has shown a sensitivity of 0.6 millivolts per Torr, an 8.6 mTorr limit of detection and a 33 millisecond response time.


Keywords: Pressure, sensor, optical, polydimethylsiloxane, membrane


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