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Vol. 103, Issue 4, April 2009, pp.73-82





Study on the Effects of Added Mass on Mechanical Behavior of a Microbeam



1Mech. Eng. Dept. Urmia University, Urmia, Iran

Tel.: +98-914-145-1407

2Sama Organization (Affiliated with Islamic Azad University), Khoy Branch, Iran

Tel.: +98-914-363-6714

E-mail: g.rezazadeh@mail.urmia.ac.ir



Received: 29 November 2008   /Accepted: 20 April 2009   /Published: 27 April 2009


Abstract: This paper presents a numerical study on the effects of added mass on the microbeams oscillating in an incompressible inviscid stationary fluid. By applying “Slender Wing” and “Three dimensional aerodynamic” theories the inertial effects of fluid on the microbeam dynamics has been modeled as a mass added to microbeam mass. The results have showed that the added mass for clamped-clamped beams are higher than cantilever beams for first mode and lower for other three modes. Galerkin-based step by step linearization method (SSLM) and Galerkin-based reduced order model have been applied to solve the nonlinear static and dynamic governing equations, respectively. Water by neglecting viscidity effects, has been considered as a surrounding fluid and the frequency response of the microbeam has been compared with that of vacuum conditions. It has been shown that because of the added mass effects in water environment, the natural frequencies of the microbeam decrease.


Keywords: MEMS, Microbeam, Added mass, Frequency response


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