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Vol. 103, Issue 4, April 2009, pp.96-101





Squeeze-Film Damping Effect on Dynamic Pull-in Voltage of an Electrostatically-Actuated Microbeam



Mech. Eng. Dept. Urmia University, Urmia, Iran

E-mail: g.rezazadeh@mail.urmia.ac.ir



Received: 5 January 2008   /Accepted: 20 April 2009   /Published: 27 April 2009


Abstract: This paper presents the squeeze-film damping effects on the dynamic response of Electrostatically-actuated clamped-clamped microbeams. In this paper has been utilized the coupled nonlinear Euler- Bernoulli beam equation (1D) and the nonlinear Reynolds equation (2D). The beam equation has been solved simultaneously with Reynolds equation. A Galerkin-based reduced-order model and finite difference method have been used for beam and Reynolds equations respectively. Obtained theoretically calculated pull-in voltages and pull-in times are in good agreement with available experimental data.


Keywords: MEMS, Fixed-Fixed Microbeam, Squeeze Film Damping


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