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Vol. 103, Issue 4, April 2009, pp.122-131





Dynamic Pull-in Phenomenon in the Fully Clamped Electrostatically Actuated
Rectangular Microplates Considering Damping Effects


Ghader Rezazadeh, Soheil Talebian, Mohammad Fathalilou

Mechanical Engineering Department, Urmia University, Urmia, Iran

Tel.: +98-914-145-1407

E-mail: g.rezazadeh@urmia.ac.ir



Received: 28 February 2009   /Accepted: 20 April 2009   /Published: 27 April 2009


Abstract: In the present article dynamic pull-in phenomenon in an electrostatically actuated microplate has been presented. This work consists of two major parts. In the first part, static instability and static pull-in voltage of a microplate subjected to non-linear electrostatic pressure has been investigated considering the effect of stretching. To this end, the nonlinear integro differential governing equation has been derived using Kirchhoff thin plate theory and linearized using Step-by-Step Linearization Method and discretized applying finite difference method. The obtained results have been compared with experimental studies and good agreement has been achieved. In the second part the Galerkin-based reduced order model has been implemented to discretize the dynamic equation of microplate motion in order to study dynamic behavior and pull-in phenomenon due to application of a step DC voltage. Also the effects of damping on dynamic pull-in voltage and pull-in time have been investigated. The obtained results show that dynamic behavior of the microplate is highly dependent on the damping characteristics of system.


Keywords: MEMS, Dynamic pull-in phenomenon, Step DC voltage, Galerkin-based reduced order model


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