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Vol. 103, Issue 4, April 2009, pp.132-143





Finite Element Analysis of Static and Dynamic Pull-In Instability of a Fixed-Fixed Micro Beam  Considering Damping Effects


1Mohammad Reza Ghazavi, 2Ghader Rezazadeh, 1Saber Azizi

1Mech. Eng. Dept. Tarbiat Modares University, Tehran, Iran

2Mech. Eng. Dept. Urmia University, Urmia, Iran,

E-mail: 1 g.rezazadeh@mail.urmia.ac.ir



Received: 16 March 2009   /Accepted: 20 April 2009   /Published: 27 April 2009


Abstract: In this paper the static and dynamic pull-in phenomenon of a fixed-fixed micro beam, considering the effects of residual stress, axial stress, damping coefficient, and Fringing field effects have statically and dynamically been analyzed. The nonlinear electromechanical coupled integro- differential equation governing the problem has been derived using variational principle and solved using a computer code based on Finite element method. The problem has been solved for various values of damping coefficients, residual and axial stresses, and various initial gaps between the micro beam and the substrate. The results showed that by increase in damping coefficient the dynamic pull-in voltage is also increased but this increase is continued up to a definite value of damping coefficient more than which, the dynamic pull-in voltage is constant and equal to the static one. The pull-in time is also determined for various damping coefficients and has been shown that with increasing the damping coefficient the pull-in time is increased.


Keywords: Pull-in instability, Damping coefficient, Residual stress, Axial stress, MEMS, Electrostatic actuation, Pull-in time


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