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Vol. 103, Issue 4, April 2009, pp.161-170





Thermo-Mechanical Behavior of a Bilayer Microbeam Subjected to Nonlinear Electrostatic Pressure


1Maliheh Pashapour, 2Seyed-Mehdi Pesteii, *3Ghader Rezazadeh, 4Shahriyar Kouravand

1,2,3 Mech. Eng. Dept., Urmia University, Urmia, Iran

4 Mech. Eng. Dept., Mashhad University, Mashhad, Iran

*E-mail: g.rezazadeh@urmia.ac.ir



Received: 28 February 2009   /Accepted: 20 April 2009   /Published: 27 April 2009


Abstract: In the present work mechanical behavior of a bilayer cantilever microbeam subjected to nonlinear electrostatic pressure and temperature variations has been studied. Nonlinear integro-differential thermo-electro mechanical equation based on Euler-Bernoulli beam theory has been derived and solved using Step-by-Step Linearization Method and finite difference method. The effect of temperature variations on static instability of the microbeam due to nonlinearity created by applied electrostatic forces has been investigated. In our model it has been shown that as the temperature increases, the applied voltage decreases, which in turn guides the system to an unstable condition, in other words, decreases the pull-in voltage. On the other hand, the pull-in voltage increases as the temperature decreases. Numerically obtained results for pull-in voltage and beam deflection are in good agreement with existing results in the literature.


Keywords: MEMS, Thermal, Electrical, Pull-in voltage, Static instability, Bilayer cantilever microbeam


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