Vol. 107, Issue 8, August 2009, pp. 64-76

Development of a Surface Micromachined On-Chip Flat Disk Micropump

M. I. KILANI¹, A. T. AL-HALHOULI², P. C. GALAMBOS³, Y. S. HAIK⁴,

A. AL-SALAYMEH^5* and S. BÜTTGENBACH²

¹Mechatronics Engineering Department, University of Jordan, Amman, 11942 Jordan
E-mail: mkilani@ju.edu.jo

²Institute for Microtechnology, Technical University Braunschweig, Alte Salzdahlumer Str. 203, 38124 Braunschweig, Germany

E-mail: a.al-halhouli@tu-bs.de, s.buettgenbach@tu-bs.de

³Intelligent Micromachine Department, Sandia National Laboratories, Albuquerque, NM 87185, USA E-mail: pcgalam@sandia.gov

⁴Mechanical Engineering Department, United Arab Emirates University, Al-Ain, UAE
E-mail: yhaik@uaeu.ac.ae

^5*Mechanical Engineering Department, Faculty of Engineering and Technology, University of Jordan, Amman, 11942 Jordan, Fax: +96265355588,
E-mail: salaymeh@ju.edu.jo

Received: 13 June 2009   /Accepted: 15 August 2009   /Published: 25 August 2009

Abstract: The paper presents research progress in the development of a surface micromachined flat disk micropump which employs the viscous and centrifugal effects acting on a layer of fluid sandwiched between a rotating flat disk and a stationary plate. The pump is fabricated monolithically on-chip using Sandia’s Ultraplanar Multilevel MEMS Technology (SUMMiT™) where an electrostatic comb-drive Torsional Ratcheting Actuator (TRA) drives the flat disk through a geared transmission. The paper reviews available analytical models for flow geometries similar to that of the described pump, and presents a set of experiments which depict its performance and possible failure modes. Those experiments highlight future research directions in the development of electrostatically-actuated, CMOS-compatible, surface micromachined pumps.

Keywords: Flat disk micropump, viscous micropumps, surface micromachining, SUMMiT™.

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