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Vol. 115, Issue 4, April 2010, pp. 11-19




Novel Pressure Sensor for Aerospace Purposes



1Technische Universität Braunschweig, Institute for Microtechnology,

Alte Salzdahlumer Straße 203, 38124 Braunschweig, Germany

Tel.: +49 5313919748, fax: +49 5313919751

2DLR, Institute of Composite Structures and Adaptive Systems,

Lilienthalplatz 7, 38108 Braunschweig, Germany

Tel.: +49 5312952301, fax: +495312952875

E-mail: t.beutel@tu-braunschweig.de, peter.wierach@dlr.de



Received: 24 February 2010   /Accepted: 20 April 2010   /Published: 27 April 2010


Abstract: In this work, a novel silicon-based sensor for pressure and flow measurements is presented. To meet the special requirements of the aerospace industry a new piezoresistive pressure sensor with a flat surface has been developed, so that the flow is not affected by the sensor. To avoid bonding-wires on top of the sensor a special through-wafer connection is presented. By making other significant changes in the layout as well as in the micro fabrication process, a novel sensor has been created. It is robust enough to be laminated in fibre material, which opens new possibilities for measurements. With this sensor it is possible to characterize the condition of the flow near the separation point. This article describes the complete process from the development to the laminated sensor.


Keywords: Piezoresistive pressure sensor for flow characterization, Silicon membrane, Micro fabrication, Through-wafer connection


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