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Vol. 115, Issue 4, April 2010, pp. 61-70




A Combined Thermo-Electrostatic MEMS-Based Switch with Low Actuation Voltage



Department of Electrical Engineering, Sahand University of Technology, Tabriz, 67240, Iran

Tel.: ++98-412-3459375, fax: ++98-412-3444333

E-mail: p_mahmoudi@sut.ac.ir, badri@sut.ac.ir, najafiaghdam@sut.ac.ir



Received: 13 December 2009   /Accepted: 20 April 2010   /Published: 27 April 2010


Abstract: Requirement of voltage up-converters due to high pull-in voltage is one of the main problems by merely electrostatic actuated MEMS-based Switches. Thermally actuated switches are another alternatives but with very high power dissipation. In this paper a low voltage switch is demonstrated, which uses a combined thermo-electrostatic actuator. The switch can be integrated with standard CMOS circuits without any up-converters. Thermally power dissipation for the switch is lower than just thermal actuators. The switching time is about 70 ms and the maximal temperature of thermal actuator is lower than 150 oC which cannot cause any longtime damage.


Keywords: RF-MEMS, Microswitch, Thermo-electrostatic actuation, Voltage up-converter, Pull-in voltage


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