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Vol. 115, Issue 4, April 2010, pp. 71-82




Output Force Enhancement of Scratch Drive Actuator in Low-Voltage Region by Using Flexible Joint


Shawn CHEN, Chiawei CHANG and Wensyang HSU

Department of Mechanical Engineering, National Chiao Tung University

1001 University Road, Hsinchu, Taiwan 30010, ROC

Tel.: 886-3-5712121-55111

E-mail: whsu@mail.nctu.edu.tw



Received: 26 March 2010   /Accepted: 20 April 2010   /Published: 27 April 2010


Abstract: Here a low-voltage scratch drive actuator (LVSDA) is proposed by incorporating flexible joint into the conventional SDA to improve performance in low-voltage region. Experimental results show that, at the same total plate length of 80 mm and width of 65 mm, the proposed LVSDA can be actuated as low as 40 V, much lower than 80 V, the minimum required input voltage of the conventional SDA. From finite element analysis by CosmosWorks, yielding effect is found to be a critical factor. Before yielding, LVSDA can provide better performance than SDA at the same input voltage. However, the yielding stress in flexible joint would limit the achievable maximum output force in high-voltage region. By varying joint length, width, or location, LVSDA is shown to be operated in low-voltage region where the conventional SDA can not be operated, and can still provide comparable performance as SDA in high-voltage region.


Keywords: MEMS, Scratch drive actuator, Flexible joint, Yielding


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