bullet Sensors & Transducers Journal

    (ISSN 1726- 5479)


2008 e-Impact Factor

25 Top Downloaded Articles

Journal Subscription 2010

Editorial Calendar 2010

Submit an Article

Editorial Board

Current Issue

Sensors & Transducers journal's cover

Sensors & Transducers Journal 2009

Sensors & Transducers Journal 2008

Sensors & Transducers Journal 2007

2000-2002 S&T e-Digest Contents

2003 S&T e-Digest Contents

2004 S&T e-Digest Contents

2005 S&T e-Digest Contents

2006 S&T e-Digest Contents


Best Articles 2009




Vol. 117, Issue 6, June 2010, pp.16-28




A Holistic Approach to Automated Synthesis of Mixed-technology Digital MEMS Sensors Part 2:
Synthesis of a MEMS System with Associated Control Loop



School of Electronics and Computer Science

University of Southampton, UK

E-mail: cz05r@ecs.soton.ac.uk, tjk@ecs.soton.ac.uk



Received: 13 May 2010   /Accepted: 21 June 2010   /Published: 25 June 2010


Abstract: Part 2 of this paper presents a holistic synthesis approach to designing both the mechanical layout and associated electronic control in a mixed-domain MEMS sensor. It develops further the concepts presented in Part 1 which focuses on layout synthesis of the mechanical part only. A case study is discussed where the proposed genetic-based synthesis approach implemented in SystemC-AGNES is applied to a high order ΣΔ control system in an electromechanical MEMS accelerometer. The method efficiently and in an automated manner generates suitable configurations of the ΣΔ control loop by combining primitive components stored in a library and optimizes them according to user specifications. The synthesis results show that the proposed technique explores the configuration space effectively and it develops new circuit structures which have not been investigated before. The noise floors in the MEMS accelerometers synthesized by SystemC-AGNES are further reduced leading to an improvement of the SNR compared with a manually designed standard electromechanical ΣΔ MEMS accelerometer.


Keywords: High order ΣΔ modulator, MEMS accelerometer, Synthesis, SystemC-A


Acrobat reader logo Click <here> or title of paper to download the full pages article (1.06 Mb)





1999 - 2010 Copyright , International Frequency Sensor Association (IFSA). All Rights Reserved.

Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - Membership - Submit Press Release

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - e-Shop - Site Map