bullet Sensors & Transducers Journal

    (ISSN 1726- 5479)


2008 e-Impact Factor

25 Top Downloaded Articles

Journal Subscription 2010

Editorial Calendar 2010

Submit an Article

Editorial Board

Current Issue

Sensors & Transducers journal's cover

Sensors & Transducers Journal 2009

Sensors & Transducers Journal 2008

Sensors & Transducers Journal 2007

2000-2002 S&T e-Digest Contents

2003 S&T e-Digest Contents

2004 S&T e-Digest Contents

2005 S&T e-Digest Contents

2006 S&T e-Digest Contents


Best Articles 2009




Vol. 117, Issue 6, June 2010, pp.92-98




Effect of Different Post Deposition Annealing Treatments on Properties of Zinc Oxide Thin Films


Arti Arora, Anil Arora, P. J. George, 1V. K. Dwivedi, 1Vinay Gupta

Kurukshetra Institute of Technology & Management, Kurukshetra, India

Department of Physics and Astrophysics, South Campus, New Delhi, India

E-mail: aarti25nov@gmail.com



Received: 30 March 2010   /Accepted: 21 June 2010   /Published: 25 June 2010


Abstract: Two different post deposition annealing atmospheres of oxygen and forming gas have been investigated for the improvement of rf sputtered zinc oxide thin films. The results show that type of atmosphere (oxidant o reduction) plays an important role in the changes observed in structural, electrical and optical properties. It has been found that the structural properties of rf sputtered zinc oxide films improve in all the annealing environments. The intensity and grain size increases as the annealing temperature increases. It has been found that films become stress free at lowest temperature in oxygen as compare to forming gas annealing. The zinc oxide films annealed in oxygen shows sufficient resistivity associated to high transmittance (83 %) characteristics required for MEMS based acoustic devices.


Keywords: Annealing, rf sputtering, Zinc oxide thin films


Acrobat reader logo Click <here> or title of paper to download the full pages article (828 Kb)





1999 - 2010 Copyright , International Frequency Sensor Association (IFSA). All Rights Reserved.

Home - News - Links - Archives - Tools - Standardization - Patents - Marketplace - Projects - Wish List - Subscribe - Search - Membership - Submit Press Release

 Members Area -Sensors Portal -Training Courses - S&T Digest - For advertisers - Bookstore - Forums - Polls - Sensor Jobs - e-Shop - Site Map