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Vol. 123, Issue 12, December 2010, pp.35-40



Numerical Analysis of Thin Film Junctionless pH-ISFET Sensor


and Toufik BENDIB

LEA, Department of Electronics, University of Batna, 05000, Algeria

Tel./fax: 0021333805494

E-mail: faycaldzdz@hotmail.com



Received: 25 August 2010   /Accepted: 21 December 2010   /Published: 28 December 2010


Abstract: In this paper, a new pH-ISFET sensor, called the Junctionless ISFET sensor (JISFET), and its numerical analysis have been proposed, investigated and expected to improve the fabrication process and the sensitivity behavior for pH-ISFET sensor-based applications. The numerical analysis has been used to predict and compare the performances of the proposed design and conventional pH-ISFET, where the comparison of device architectures shows that the proposed pH- JISFET sensor exhibits a superior performance with respect to the conventional pH-ISFET in term of fabrication process and electrical performances. Moreover, the proposed design has linear pH sensitivities of approximately 59.6 mV/pH for wide concentration range (from pH =2 to pH=12). The obtained results make the Junctionless ISFET sensor a promising candidate for future CMOS-based sensors.


Keywords: Junctionless ISFET, Thin film, Sensor, Electrical performances


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