Vol. 127, Issue 4, April 2011, pp.1-14

Going Fabless with MEMS

Bhaskar CHOUBEY

School of Engineering, University of Glasgow, UK

Tel.: +44 141 3307155

E-mail: bhaskar.choubey@glasgow.ac.uk

Received: 6 April 2011   /Accepted: 22 April 2011   /Published: 30 April 2011

Abstract: The Microelectromechanical sensors are finding increasing applications in everyday life. However, each MEMS sensor is generally fabricated on its own individual process. This leads to high cost per sensor. It has been suggested the MEMS should and would follow the path of integrated circuits industry, wherein fabless firms could concentrate on design leading pure-foundries to perfect the manufacturing process. With several designs being manufactured on the same process, the installation cost of fabrication would be evenly shared. Simultaneously, multiple project wafer runs are being offered for MEMS processes to encourage design activity in universities as well as startups. This paper reviews the present state of this transition through an experience of designing and manufacturing microelectromechanical resonators on different processes.

Keywords: MEMS fabrication, Fabless, Resonant sensors, Coupled detectors, Mass sensors

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