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Vol. 127, Issue 4, April 2011, pp.27-35




 Virtual Fabrication of Silicon Nitride Based Multifunctional MEMS Pressure Sensor


Mahesh Kumar PATANKAR

Real Time Systems Division, Electronics & Instrumentation Group,

Indira Gandhi Centre for Atomic Research, Kalpakkam -603102, Tamil Nadu, India

Tel.: + 91 44 27480500 ext. 22620, fax: +91 44 27480228

E-mail: patankar@igcar.gov.in



Received: 23 December 2010   /Accepted: 22 April 2011   /Published: 30 April 2011


Abstract: This paper shows how to combine absolute and differential pressure sensor on single silicon substrate for measuring the pressure in 0 1 MPa range. In this work, the sensor makes use a of silicon nitride square diaphragm supported by a thick silicon rim. Piezoresistors below the diaphragms are defined by the p+ etch stop technique and structured by the anisotropic etching in Wheatstone bridge configuration. In event of pressure, mechanical deformation occurs in the diaphragm and induces the stress in it which can be translated into electrical signal accordingly. This sensor shows the sensitivity of 142 mV/V.KPa. The pressure sensor has been designed, simulated and virtually fabricated using Intellisuite MEMS software tool. Simulation results shows that the good agreement with the analytical solutions.


Keywords: MEMS, Silicon nitride diaphragm, Piezoresistive, FEM, SUI technology


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